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进口真空插板阀原理特点及品牌(图)

作者:托马斯·贝尔森·伍德 发布时间:2021-01-14 15:09:22点击:
进口真空插板阀

进口真空插板阀原理特点

进口真空插板阀是通过电磁换向阀改变气路方向,控制执行气缸驱动阀板作上下运动,达到阀门的开启或关闭目的,用于接通或切断真空管路中的气流。适用介质为纯净空气或非腐蚀性气体。带信号反馈装置。可带水冷。
Valves handle applications in semiconductorand other processing, and are used most often to isolate pumps and sample entrylocks from HV or UHV work chambers.
Features
1、CF Flanged (with Copper Gasket): Operate in the atmosphere to 10-11 torr pressure range,bakeable up to 200° C (with actuator removed)
2、General purposeElectropolished Stainless Steel
3、Vacuum brazed at1,100° C to ensure reliable operation at HV and UHV pressures
4、Provide highconductance within a compact design
5、Shock-free operationwith minimum vibration
6、100,000-cycleservice before requiring maintenance
7、Available in manualor pneumatic operation
8、Pneumatic valvesclose or remain closed in the event of power loss or loss of air pressure
9、All Pneumatic1.5" flange O.D. and larger models incorporate magnetic REED switches forposition indication
10、Pneumatic valvesfeature a 120VAC solenoid operator at no extra charge (other voltages, both ACand DC, available on request)
NOTE:
1、For ease ofmaintenance, the carriage assembly can be removed from the body withoutrequiring removal of the valve from the system. Please contact us for optionssuch as roughing ports or valves that remain open in the event of powerfailure.
2、Actuator on SG0063MCCF cannotbe removed without breaking vacuum.
Specifications Table
Pressure Range(torr)
1 x 10-11 to 760
Differential Press (torr)
760 eitherdirection
Max ΔPress Before Open (torr)
20
Material
Body:Electropolished 304 stainless steel Gate: Electropolished 304 stainless steel Bellows: AM-350 Seals: Fluorocarbon o-ring
Dimensional Drawings
Flange Size
Port ID
Max Conductance (L/Sec.)
Dim A
Dim B
Dim C
Thread
Weight (lbs.)
1-1/3" CF
0.625"
10
1.56
1.31
4.19
8-32
3
1-1/3" CF
0.625"
10
1.56
1.31
4.19
M4
3
2-3/4" CF
1.50"
130
2.03
2.46
8.30
1/4-28
10
2-3/4" CF
1.50"
130
2.03
2.46
8.30
M6
10
3-3/8" CF
2"
270
2.28
2.96
9.21
5/16-24
13
3-3/8" CF
2"
270
2.28
2.96
9.21
M8
13
4-1/2" CF
2.5"
500
2.41
3.52
10.12
5/16-24
18
4-1/2" CF
2.5"
500
2.41
3.52
10.12
M8
18
4-5/8" CF
3"
800
2.53
4.28
11.33
5/16-24
22
4-5/8" CF
3"
800
2.53
4.28
11.33
M8
22
6" CF
4"
1,700
2.97
5.65
18.67
5/16-24
33
6" CF
4"
1,700
2.97
5.65
18.67
M8
33
8" CF
6"
5,200
3.17
7.55
21.99
5/16-24
50
8" CF
6"
5,200
3.17
7.55
21.99
M8
50
10" CF
8"
12,000
3.35
10.02
26.34
5/16-24
75
10" CF
8"
12,000
3.35
10.02
26.34
M8
75
12" CF
10"
21,500
3.89
12.00
36.80
5/16-24
147
12" CF
10"
21,500
3.89
12.00
36.80
M8
147
13-1/4" CF
10.75"
25,000
3.89
13.08
39.28
3/8-24
160
13-1/4" CF
10.75"
25,000
3.89
13.08
39.28
M10
160
14" CF
12"
34,900
3.89
14.24
41.53
3/8-24
170
14" CF
12"
34,900
3.89
14.24
41.53
M10
170

进口真空插板阀品牌

进口真空插板阀品牌
德国托马斯阀门集团于1933年创建于德国鲁尔工业区,也是世界最重要的工业区。位于德国西部、莱茵河下游支流鲁尔河与利珀河之间的地区。德国托马斯阀门集团是以生产高品质、先进的阀门、测量及控制系统而享誉全球的跨国性生产企业。采用世界先进的设备及生产工艺,所有产品都在严格的质量体系监控下完成作业。并在各大洲几十个国家拥有子公司及分支机构。